EFFECT OF HIGH-ENERGY CARBON ION IRRADIATION IN ALIGNED AND RANDOM DIRECTIONS ON MICROSTRUCTURE OF (111) AU FILMS

被引：7

作者：

NAKAO, S

SAITOH, K

IKEYAMA, M

NIWA, H

TANEMURA, S

MIYAGAWA, Y

MIYAGAWA, S

机构：

[1] Particle Beam Science Laboratory, National Industrial Research Institute of Nagoya, Kita-ku, Nagoya, 462

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7A期

关键词：

(111) AU FILM; MGO(100) SUBSTRATE; CARBON BEAM IRRADIATION; ALIGNED DIRECTION; RANDOM DIRECTION; RBS CHANNELING;

D O I：

10.1143/JJAP.33.4100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

(111)-Oriented Au films were irradiated with 1.8 MeV C ion beams in [111]-aligned and random directions at 450 and 650-degrees-C. The structural changes induced by the irradiations were examined. The results showed that the grain growth and the reduction of dislocations and stacking faults occurred upon irradiation. Furthermore, the aligned irradiation more strongly effected the structural changes of the Au films than the random irradiation at 450-degrees-C.

引用

页码：4100 / 4101

页数：2

共 5 条

[1] ION-BEAM-INDUCED EPITAXY IN B-IMPLANTED SILICON PREAMORPHIZED WITH GE IONS [J].

KURIYAMA, K ;

TAKAHASHI, H ;

SHIMOYAMA, K ;

HAYASHI, N ;

HASEGAWA, M ;

KOBAYASHI, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 :994-997

[2] CHANNELING DEPENDENCE OF ION-BEAM-INDUCED EPITAXIAL RECRYSTALLIZATION IN SILICON [J].

LINNROS, J ;

HOLMEN, G .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) :1513-1517

[3]

Saitoh K., 1990, Reports of the Government Industrial Research Institute, Nagoya, V39, P259

[4] DAMAGE PRODUCTION AND REDUCTION OF SINGLE-CRYSTALLINE TIN FILMS BY 1.8 MEV CARBON BEAM IRRADIATION [J].

SAITOH, K ;

NAKAO, S ;

NIWA, H ;

IKEYAMA, M ;

MIYAGAWA, Y ;

MIYAGAWA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12A) :4020-4024

[5] INTERFACIAL ENERGY AS A FACTOR IN CONTROLLING EPITAXIAL BEHAVIOR [J].

SATO, H ;

SHINOZAK.S .

SURFACE SCIENCE, 1970, 22 (02) :229-&

← 1 →