SPUTTERING BY LIGHT-ION BOMBARDMENT

被引：14

作者：

FALCONE, G ^{[1
]}

GULLO, F ^{[1
]}

机构：

[1] UNITA GNSM CISM COSENZA,COSENZA,ITALY

来源：

PHYSICS LETTERS A | 1987年 / 125卷 / 08期

关键词：

D O I：

10.1016/0375-9601(87)90178-2

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：432 / 434

页数：3

共 13 条

[1]

ANDERSEN HH, 1981, SPUTTERING ION BOMBA, V1

[2]

BEHRISCH R, 1981, APPL PHYS, V18, P391

[3] EJECTION PROCESS IN COLLISIONAL SPUTTERING [J].

FALCONE, G .

PHYSICAL REVIEW B, 1986, 33 (07) :5054-5056

[4] THEORY OF COLLISIONAL SPUTTERING [J].

FALCONE, G .

SURFACE SCIENCE, 1987, 187 (01) :212-222

[5] DEPTH OF ORIGIN OF SPUTTERED ATOMS [J].

FALCONE, G ;

SIGMUND, P .

APPLIED PHYSICS, 1981, 25 (03) :307-310

[6] ENERGY-SPECTRA OF ATOMS SPUTTERED BY KEV LIGHT-ION BOMBARDMENT [J].

FALCONE, G ;

OLIVA, A .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (04) :201-203

[7]

FALCONE G, 1984, RAD EFFECTS LETT, V85, P74

[8]

MATSUNAMI N, 1980, IPPJAM14 U NAG REP

[9] PLASMA-SURFACE INTERACTIONS IN TOKAMAKS [J].

MCCRACKEN, GM ;

STOTT, PE .

NUCLEAR FUSION, 1979, 19 (07) :889-981

[10]

SIGMUND P, 1972, REV ROUM PHYS, V17, P969

← 1 2 →