SPATIAL DISTRIBUTIONS OF METASTABLE ARGON, TEMPERATURE AND ELECTRON NUMBER DENSITY IN AN INDUCTIVELY COUPLED ARGON PLASMA

被引：73

作者：

UCHIDA, H ^{[1
]}

TANABE, K ^{[1
]}

NOJIRI, Y ^{[1
]}

HARAGUCHI, H ^{[1
]}

FUWA, K ^{[1
]}

机构：

[1] UNIV TOKYO,FAC SCI,DEPT CHEM,BUNKYO KU,TOKYO 113,JAPAN

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1981年 / 36卷 / 07期

关键词：

D O I：

10.1016/0584-8547(81)80122-X

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：711 / 718

页数：8

共 20 条

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[6]

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SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1976, 31 (8-9) :459-473

[8] SPECTROMETRIC STUDY OF A 40-MHZ INDUCTIVELY COUPLED PLASMA .3. TEMPERATURES AND ELECTRON NUMBER DENSITY [J].

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[9] EXCITATION TEMPERATURES AND ELECTRON NUMBER DENSITIES EXPERIENCED BY ANALYTE SPECIES IN INDUCTIVELY COUPLED PLASMAS WITH AND WITHOUT PRESENCE OF AN EASILY IONIZED ELEMENT [J].

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[10] SPATIAL-DISTRIBUTION OF TEMPERATURE AND NUMBER DENSITIES OF ELECTRONS AND ATOMIC AND IONIC SPECIES IN AN INDUCTIVELY COUPLED RF ARGON PLASMA [J].

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