PROPERTIES OF METAL-CLUSTERS IN POLYMERIZED HYDROCARBON VERSUS FLUOROCARBON MATRICES

被引：39

作者：

LAURENT, C ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,650 HARRY RD,SAN JOSE,CA 95120

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 04期

关键词：

D O I：

10.1063/1.342944

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1717 / 1723

页数：7

共 18 条

[1] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
DISCHLER, B
BRANDT, G
KOIDL, P
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4590 - 4595
[2] SOME CHEMICAL ASPECTS OF THE FLUOROCARBON PLASMA ETCHING OF SILICON AND ITS COMPOUNDS
COBURN, JW
KAY, E
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1979, 23 (01) : 33 - 41
[3] ULTRAFINE METAL PARTICLES
GRANQVIST, CG
BUHRMAN, RA
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (05) : 2200 - 2219
[4] INCORPORATION OF METALS INTO FLUOROPOLYMER FILMS SYNTHESIZED BY PLASMA TECHNIQUES
KAY, E
DILKS, A
HETZLER, U
[J]. JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1978, A12 (09): : 1393 - 1398
[5] PLASMA POLYMERIZATION OF FLUOROCARBONS IN RF CAPACITIVELY COUPLED DIODE SYSTEM
KAY, E
DILKS, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01): : 1 - 11
[6] METAL-CLUSTERS IN PLASMA POLYMERIZED MATRICES - GOLD
KAY, E
HECQ, M
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (02) : 370 - 374
[7] METAL-CLUSTERS IN PLASMA POLYMERIZED FLUOROCARBON FILMS - COBALT-ALUMINUM
KAY, E
HECQ, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 401 - 404
[8] ORGANOTIN POLYMERS FORMED BY GLOW-DISCHARGE POLYMERIZATION
KNY, E
LEVENSON, LL
JAMES, WJ
AUERBACH, RA
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1980, 84 (12) : 1635 - 1638
[9] LAURENT C, UNPUB
[10] OPTICAL-PROPERTIES AND SOLAR SELECTIVITY OF COEVAPORATED CO-AL2O3 COMPOSITE FILMS
NIKLASSON, GA
GRANQVIST, CG
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (09) : 3382 - 3410

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