LOCALIZED SUBSTRATE HEATING DURING ION-IMPLANTATION

[1] AKASAKA Y, 1974, J JPN SOC APPL PHYS, V43, P493

[2] HEATING OF SOLID TARGETS WITH LASER PULSES [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (04) : 1585 - 1593

[3] STRESS IN ION-IMPLANTED CVD SI3N4 FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3337 - 3341

[4] EERNISSE EP, 1977, JUN EL MAT C ITH

[5] JACKSON JH, 1976, P 7 INT C EL ION BEA, P445

[6] MAYER JW, 1970, ION IMPLANTATION SEM, P25

[7] MCADAMS WH, 1954, HEAT TRANSMISSION, pCH3

[8] AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (110): : 291 - &

[9] THERMAL-ANALYSIS OF THIN-FILM MICROMACHINING WITH LASERS [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) : 2260 - 2268

[10] PARRY PD, 1977, J ELECTROCHEM SOC, V124, pC105

[1] AKASAKA Y, 1974, J JPN SOC APPL PHYS, V43, P493

[2] HEATING OF SOLID TARGETS WITH LASER PULSES [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (04) : 1585 - 1593

[3] STRESS IN ION-IMPLANTED CVD SI3N4 FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3337 - 3341

[4] EERNISSE EP, 1977, JUN EL MAT C ITH

[5] JACKSON JH, 1976, P 7 INT C EL ION BEA, P445

[6] MAYER JW, 1970, ION IMPLANTATION SEM, P25

[7] MCADAMS WH, 1954, HEAT TRANSMISSION, pCH3

[8] AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (110): : 291 - &

[9] THERMAL-ANALYSIS OF THIN-FILM MICROMACHINING WITH LASERS [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) : 2260 - 2268

[10] PARRY PD, 1977, J ELECTROCHEM SOC, V124, pC105