EXO-DIFFUSION OF HYDROGEN IN AMORPHOUS-SILICON

被引：29

作者：

ZELLAMA, K

GERMAIN, P

SQUELARD, S

MONGE, J

LIGEON, E

机构：

[1] UNIV PARIS 7,F-75221 PARIS 05,FRANCE

[2] CEN,CEA,DEPT PHYS FONDAMENTALE,F-38041 GRENOBLE,FRANCE

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1980年 / 35-6卷 / JAN-期

关键词：

D O I：

10.1016/0022-3093(80)90598-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：225 / 230

页数：6

共 18 条

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[2]

BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[3] PLASMA PREPARATIONS OF AMORPHOUS SILICON FILMS [J].

BRODSKY, MH .

THIN SOLID FILMS, 1978, 50 (MAY) :57-67

[4] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON [J].

BRODSKY, MH ;

FRISCH, MA ;

ZIEGLER, JF ;

LANFORD, WA .

APPLIED PHYSICS LETTERS, 1977, 30 (11) :561-563

[5] SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON [J].

CARLSON, DE ;

MAGEE, CW .

APPLIED PHYSICS LETTERS, 1978, 33 (01) :81-83

[6]

DIEUMEGARDE D, UNPUBLISHED

[7]

HANGEL A, ENCYCLOPEDIA CHEM

[8]

IWMSA, COMMUNICATION

[9] HYDROGENATION OF EVAPORATED AMORPHOUS SILICON FILMS BY PLASMA TREATMENT [J].

KAPLAN, D ;

SOL, N ;

VELASCO, G ;

THOMAS, PA .

APPLIED PHYSICS LETTERS, 1978, 33 (05) :440-442

[10] NEW UTILIZATION OF B-11 ION-BEAMS - HYDROGEN ANALYSIS BY H-1 (B-11, ALPHA) ALPHA ALPHA NUCLEAR-REACTION [J].

LIGEON, E ;

GUIVARCH, A .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 22 (02) :101-105

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