PREPARATION OF OXYNITRIDE SILICON GLASSES - NITRIDATION OF FUNCTIONAL SILICA XEROGELS

Nitridation of functional silica gels under ammonia flow has been performed. The amount of nitrogen incorporated depends on the nature of functions which acts upon the extent of redistribution reactions and therefore upon the functionality of the gels. Gels containing SiH groups or bridging functions such as SiCH2CH2Si and SiSi are the best candidate precursors to oxynitride silica glasses in this approach.