ELLIPSOMETER STUDY OF ANODIC OXIDES FORMED ON SPUTTERED TANTALUM AND TANTALUM-ALUMINUM ALLOY FILMS

被引：35

作者：

MUTH, DG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.1315750

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：749 / &

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