DIRECT-CURRENT MAGNETRON FABRICATION OF INDIUM TIN OXIDE INP SOLAR-CELLS

被引:12
作者
COUTTS, TJ
WU, X
GESSERT, TA
LI, X
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575278
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:1722 / 1726
页数:5
相关论文
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