ULTRATHIN FILM GROWTH OF SILICIDES STUDIED USING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION AND AUGER

被引:14
作者
BENNETT, PA
BUTLER, JR
TONG, X
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.575952
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2174 / 2179
页数:6
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