SCANNING ELECTRON-MICROSCOPIC OBSERVATION OF METAL-SURFACES ERODED BY ARGON IONS

被引：25

作者：

SHIMIZU, R ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA,JAPAN

来源：

关键词：

D O I：

10.1143/JJAP.13.228

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：228 / 233

页数：6

共 7 条

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CHENEY, KB ;

PITKIN, ET .

[2]

ISHITANI T, 1973, JAPAN J APPL PHYS, P926

PUNZEL, J ;

HAUFFE, W .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1972, 14 (02) :K97-&

[4]

SHIMIZU R, 1973, SCANNING ELECTRON MI

[5] MICROTOPOGRAPHY OF SURFACES ERODED BY ION-BOMBARDMENT [J].

STEWART, ADG ;

THOMPSON, MW .

[6] CONE FORMATION ON METAL TARGETS DURING SPUTTERING [J].

WEHNER, GK ;

HAJICEK, DJ .

[7]

WILSON IH, 1971, J MATER SCI, V6, P1962