LOW-TEMPERATURE SURFACE CLEANING METHOD USING LOW-ENERGY REACTIVE IONIZED SPECIES

被引：42

作者：

YAMADA, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 02期

关键词：

D O I：

10.1063/1.343067

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：775 / 781

页数：7

共 56 条

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