HYDROGEN-SENSITIVE PALLADIUM FILM STUDY WITH PRECISE AND FAST ELLIPSOMETERS

被引：9

作者：

PEROV, PI ^{[1
]}

KOVALEV, VI ^{[1
]}

RUKOVISHNIKOV, AI ^{[1
]}

ROSSUKANYI, NM ^{[1
]}

JOHNSON, WH ^{[1
]}

机构：

[1] SUFFOLK UNIV,BOSTON,MA 02114

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 1994年 / 76卷 / 05期

关键词：

D O I：

10.1080/00207219408925980

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The hydrogen influence on the complex pseudodielectric function was investigated with high speed high precision ellipsometers based on the light polarization state switching method. The influence of current pulses through the film on the kinetics of the process was studied, showing increased speed of transient processes and a relatively small effect in stationary hydrogen concentration conditions, resulting in shorter transient times for subsequent hydrogen pulses.

引用

页码：797 / 803

页数：7

共 5 条

[1] Azzam R. M. A., 1977, ELLIPSOMETRY POLARIZ
[2] ACTIVATION OF HYDROGEN SENSITIVE PALLADIUM-OXIDE-SEMICONDUCTOR STRUCTURES STUDIED WITH SIMULTANEOUS ELLIPSOMETRIC AND CAPACITANCE MEASUREMENTS
JANSSON, R
ARWIN, H
ARMGARTH, M
LUNDSTROM, I
[J]. APPLIED SURFACE SCIENCE, 1989, 37 (01) : 44 - 54
[3] KOVALEV VI, 1991, PHYSICS SEMICONDUCTO, P244
[4] RZHANOV AE, 1990, MIKROELEKTRONIKA, V19, P106
[5] INVESTIGATION OF DC PLANAR-MAGNETRON-SPUTTERED PALLADIUM FILMS BY SPECTROSCOPIC ELLIPSOMETRY
SULLIVAN, BT
PARSONS, RR
[J]. THIN SOLID FILMS, 1987, 154 (1-2) : 281 - 289

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