DEFECT PRODUCTION AND RECOMBINATION DURING LOW-ENERGY ION PROCESSING

被引：9

作者：

KELLERMAN, BK ^{[1
]}

FLORO, JA ^{[1
]}

CHASON, E ^{[1
]}

BRICE, DK ^{[1
]}

PICRAUX, ST ^{[1
]}

WHITE, JM ^{[1
]}

机构：

[1] UNIV TEXAS,CTR SCI & TECHNOL,AUSTIN,TX 78712

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579660

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：972 / 978

页数：7

共 20 条

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