MICROFABRICATION OF MOLECULAR SCALE MICROSTRUCTURES

被引：16

作者：

DECKMAN, HW

ABELES, B

DUNSMUIR, JH

ROXLO, CB

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 09期

关键词：

D O I：

10.1063/1.98158

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：504 / 506

页数：3

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