MICROFABRICATION AS A SCIENTIFIC TOOL

被引：45

作者：

HOWARD, RE

LIAO, PF

SKOCPOL, WJ

JACKEL, LD

CRAIGHEAD, HG

机构：

来源：

SCIENCE | 1983年 / 221卷 / 4606期

关键词：

D O I：

10.1126/science.221.4606.117

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：117 / 121

页数：5

共 53 条

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