EVIDENCE OF A PHOTON EFFECT DURING THE VISIBLE LASER-ASSISTED DEPOSITION OF POLYCRYSTALLINE SILICON FROM SILANE

被引：13

作者：

AUVERT, G

TONNEAU, D

PAULEAU, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 13期

关键词：

D O I：

10.1063/1.99211

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1062 / 1064

页数：3

共 12 条

[1]

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[3]

AUVERT G, 1988, IN PRESS ELECTROCHEM

[4]

BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

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BEERS, AM ;

BLOEM, J .

APPLIED PHYSICS LETTERS, 1982, 41 (02) :153-155

[6] CHEMICAL VAPOR-DEPOSITION OF SILICON USING A CO2-LASER [J].

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LAKIN, KM .

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[7]

EHRLICH DJ, 1981, APPL PHYS LETT, V39, P957, DOI 10.1063/1.92624

[8]

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[9]

PAULEAU Y, 1984, CHEM PHYSICS SERIES, V39, P215

[10] CO2-LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SILICON FROM SILANE [J].

TONNEAU, D ;

AUVERT, G ;

PAULEAU, Y .

THIN SOLID FILMS, 1987, 155 (01) :75-86

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