THE TACKING CCD - A NEW CCD CONCEPT

被引:3
作者
BAKKER, JGC
ESSER, LJM
PEEK, HL
SWEENEY, CJ
KOKSHOORN, AL
THEUWISSEN, AJP
机构
[1] Philips Research Laboratories, 5600, JA Eindhoven
关键词
D O I
10.1109/16.78397
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The Tacking CCD is a new type of charge transport mechanism that is suitable for junction- as well as MOS-type CCD's. A specific form, the Trenched Tacking CCD (TTCCD), promises high pixel density and high charge handling capability per unit of surface area. The TTCCD structure is suitable for making new types of solid-state image sensors with increased light sensitivity and there is the possibility of incorporating a vertical overflow drain. First samples of the TTCCD have been realized and its functionality has been confirmed.
引用
收藏
页码:1193 / 1200
页数:8
相关论文
共 23 条
[1]  
ESSER LJM, 1981, HDB SEMICONDUCTORS, V4, P335
[2]  
ESSER LJM, 1985, P SPIE C, V591, P61
[4]  
FOSSUM ER, 1990, 1990 P IEEE WORKSH A
[5]   DEPTH PROFILES OF BORON ATOMS WITH LARGE TILT-ANGLE IMPLANTATIONS [J].
FUSE, G ;
UMIMOTO, H ;
ODANAKA, S ;
WAKABAYASHI, M ;
FUKUMOTO, M ;
OHZONE, T .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (05) :996-998
[6]   A NEW ISOLATION METHOD WITH BORON-IMPLANTED SIDEWALLS FOR CONTROLLING NARROW-WIDTH EFFECT [J].
FUSE, G ;
FUKUMOTO, M ;
SHINOHARA, A ;
ODANAKA, S ;
SASAGO, M ;
OHZONE, T .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (02) :356-360
[7]  
Hobson G. S., 1978, CHARGE TRANSFER DEVI
[8]   A NEW HIGH-RESOLUTION 11-MM DIAGONAL IMAGE SENSOR FOR STILL-PICTURE PHOTOGRAPHY [J].
HYNECEK, J .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (11) :2466-2474
[9]   THE CORRECT EQUIVALENT BOX REPRESENTATION FOR THE BURIED LAYER OF BC MOSFETS IN TERMS OF THE IMPLANTATION PARAMETERS [J].
KARMALKAR, S ;
BHAT, KN .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (10) :457-459
[10]   A CHANNEL-STOP-DEFINED BARRIER AND DRAIN ANTIBLOOMING STRUCTURE FOR VIRTUAL PHASE CCD IMAGE SENSORS [J].
KEENAN, WF ;
HOSACK, HH .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (09) :1634-1638