EXPERIMENTAL-EVIDENCE OF BOTH INTERSTITIAL-ASSISTED AND VACANCY-ASSISTED DIFFUSION OF GE IN SI

被引：81

作者：

FAHEY, P

IYER, SS

SCILLA, GJ

机构：

来源：

关键词：

D O I：

10.1063/1.100863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：843 / 845

页数：3

共 15 条

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