A LASER DRILLED APERTURE FOR USE IN AN ULTRAHIGH-VACUUM GAS DOSER

被引：29

作者：

HAGANS, PL

DEKOVEN, BM

WOMACK, JL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.576346

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3375 / 3377

页数：3

共 4 条

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[2] DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS
CAMPBELL, CT
VALONE, SM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02): : 408 - 411
[3] SHOEMAKER DP, 1981, EXPT PHYSICAL CHEM
[4] A MULTIPURPOSE QUADRUPOLE MASS-SPECTROMETER DETECTOR FOR SURFACE KINETIC AND ABSOLUTE SURFACE COVERAGE MEASUREMENTS
SMENTKOWSKI, VS
YATES, JT
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1989, 7 (06): : 3325 - 3331