RANGE PARAMETERS OF HEAVY-IONS IMPLANTED INTO BORON FILMS

被引：15

作者：

BEHAR, M ^{[1
]}

GRANDE, PL ^{[1
]}

DEOLIVEIRA, RW ^{[1
]}

BIERSACK, JP ^{[1
]}

机构：

[1] HAHN MEITNER INST KERNFORSCH BERLIN GMBH,W-1000 BERLIN 34,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷

关键词：

D O I：

10.1016/0168-583X(91)95162-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Boron films were implanted with Pb, Bi and Au ions of energies ranging from 10 to 300 keV. Range parameters were determined using the Rutherford backscattering technique. The experimental results are 20-40% higher than the theoretical predictions by Ziegler, Biersack and Littmark. Good agreement is achieved only when inelastic effects are included in the nuclear collision processes.

引用

页码：1 / 4

页数：4

共 14 条

[1]

BEHAR M, 1985, NUCL INSTRUM METH B, V6, P483

[2] EVIDENCE FOR AN INSULATOR-METAL EFFECT ON THE Z1 RANGE OSCILLATIONS IN THE NUCLEAR STOPPING REGIME [J].

BERTHOLD, J ;

KALBITZER, S .

PHYSICS LETTERS A, 1982, 91 (01) :37-39

[3] A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].

BIERSACK, JP ;

HAGGMARK, LG .

NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269

[4] EFFECTIVE STOPPING-POWER CHARGES OF SWIFT IONS IN CONDENSED MATTER [J].

BRANDT, W ;

KITAGAWA, M .

PHYSICAL REVIEW B, 1982, 25 (09) :5631-5637

[5]

CHU WK, 1988, BACKSCATTERING SPECT

[6] RANGE PROFILES OF 10 TO 390 KEV IONS (29-LESS-THAN-OR-EQUAL-TO-Z1-LESS-THAN-OR-EQUAL-TO-83) IMPLANTED INTO AMORPHOUS-SILICON [J].

FICHTNER, PFP ;

BEHAR, M ;

OLIVIERI, CA ;

LIVI, RP ;

DESOUZA, JP ;

ZAWISLAK, FC ;

BIERSACK, JP ;

FINK, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (04) :481-487

[7] RANGE PARAMETERS OF HEAVY-IONS IMPLANTED INTO C-FILMS [J].

GRANDE, PL ;

FICHTNER, PFP ;

BEHAR, M ;

ZAWISLAK, FC .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :122-124

[8] RANGE PARAMETERS OF HEAVY-IONS IMPLANTED INTO BE FILMS [J].

GRANDE, PL ;

BEHAR, M ;

BIERSACK, JP ;

ZAWISLAK, FC .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4) :689-692

[9]

GRANDE PL, IN PRESS

[10] EXPERIMENTAL-STUDY OF EFFECTIVE INTER-ATOMIC POTENTIALS [J].

LOFTAGER, P ;

BESENBACHER, F ;

JENSEN, OS ;

SORENSEN, VS .

PHYSICAL REVIEW A, 1979, 20 (04) :1443-1447

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