THE EFFECT OF SUBSTRATE-TEMPERATURE ON THE PROPERTIES OF SPUTTERED TIN OXIDE-FILMS

被引：15

作者：

MENG, LJ

DOSSANTOS, MP

机构：

[1] Physics Department, Minho University

来源：

THIN SOLID FILMS | 1994年 / 237卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(94)90246-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tin oxide thin films have been deposited on glass substrates by the d.c. reactive magnetron sputtering method. The dependence of electrical, structural and optical properties of films on the substrate temperature was studied. The single-oscillator model was used to fit the dispersion of the refractive index with the wavelength. Rayleigh-type scattering was assumed for explaining the variation of the transmittance.

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页码：112 / 117

页数：6

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