CRYSTALLIZATION OF DIAMOND FROM THE GAS-PHASE .1.

被引：141

作者：

BADZIAN, AR ^{[1
]}

DEVRIES, RC ^{[1
]}

机构：

[1] GE,CORP RES & DEV,SCHENECTADY,NY 12301

来源：

MATERIALS RESEARCH BULLETIN | 1988年 / 23卷 / 03期

关键词：

CHEMICAL OPERATIONS - Chemical Vapor Deposition - CHEMICAL REACTIONS - Reaction Kinetics - CRYSTALLIZATION - Mathematical Models - HYDROCARBONS - Pyrolysis;

D O I：

10.1016/0025-5408(88)90013-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper discusses mechanisms of diamond growth from the gas phase, taking into account previously presented theory and experimental data. A chemical kinetics model for the deposition of diamond and graphite from hydrocarbon gases is presented, based on the work of Derjaguin, Fedoseev and coworkers. The mechanism proposed by Derjaguin et al. is expanded to consider the relationship between the temperature dependence of the growth rate and the atomic reconstruction of the diamond surface. A diamond growth process is proposed which integrates chemical factors (thermodynamics, kinetics, chemisorption) and physical factors (thermal vibrations, surface transformation, surface diffusion).

引用

页码：385 / 400

页数：16

共 40 条

[11]

FEDOSEEV D. V., 1984, CRYSTALLIZATION DIAM

[12] ETCH PITS AND TRIGONS ON DIAMOND .1. [J].