RAMAN STUDY OF VIBRATIONAL PROPERTIES OF IMPLANTED SILICON

被引:28
作者
MORHANGE, JF [1 ]
BESERMAN, R [1 ]
BALKANSKI, M [1 ]
机构
[1] UNIV PARIS 06, CNRS, LAB PHYS SOLID, PARIS, FRANCE
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1974年 / 23卷 / 02期
关键词
D O I
10.1002/pssa.2210230206
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:383 / 391
页数:9
相关论文
共 23 条
[1]  
BESERMAN R, 1972, INT C SEMICONDUCTORS, P1181
[2]  
BLAMIRES HG, 1971, 1971 INT C ION IMPL, P119
[3]  
BOURGOIN J, 1974, J PHYSIQUE, V34, P49
[4]  
BOURGOIN J, 1973, M FRENCH PHYSICAL SO
[5]  
BRODSKY MH, 1972, INT C SEMICONDUCTORS, P529
[6]   INTRINSIC OPTICAL ABSORPTION IN SINGLE-CRYSTAL GERMANIUM AND SILICON AT 77-DEGREES-K AND 300-DEGREES-K [J].
DASH, WC ;
NEWMAN, R .
PHYSICAL REVIEW, 1955, 99 (04) :1151-1155
[7]  
DELLAMEA G, 1971, PHYS STATUS SOLIDI A, V4, P797, DOI 10.1002/pssa.2210040325
[8]   LATTICE LOCATION OF BORON IONS IMPLANTED INTO SILICON [J].
FLADDA, G ;
BJORKQVIST, K ;
ERIKSSON, L ;
SIGURD, D .
APPLIED PHYSICS LETTERS, 1970, 16 (08) :313-+
[9]  
JOHNSON WS, 1969, PROJECTED RANGE STAT