EFFECT OF SURFACE PREPARATION AND HEAT-TREATMENT ON HOLE DIFFUSION LENGTHS IN VPE GAAS AND GAAS0.6P0.4

Chemical etching of a semiconducting surface is a process which can deposit trace amounts of metals that can have significant effects on the bulk lifetime after heat-treatment. Several frequently used cleaning processes have been shown to be poor in this respect and improved versions are suggested. The effectiveness of an etchant in cleaning a surface of trace metallic impurities is greater for larger etching rates, and smaller for larger metallic impurity content in the etchant. © 1979, The Electrochemical Society, Inc. All rights reserved.