MICROSTRUCTURAL DEVELOPMENT IN THE NEAR-SURFACE REGION DURING THERMAL ANNEALING OF AL2O3 IMPLANTED WITH CATIONIC IMPURITIES

被引：30

作者：

FARLOW, GC

SKLAD, PS

WHITE, CW

MCHARGUE, CJ

机构：

[1] OAK RIDGE NATL LAB,DIV MET & CERAM,OAK RIDGE,TN 37831

[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

来源：

JOURNAL OF MATERIALS RESEARCH | 1990年 / 5卷 / 07期

基金：

美国能源部;

关键词：

D O I：

10.1557/JMR.1990.1502

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Single-crystal A12O3 was implanted with cationic impurities in the dose range 1−4 × 1016/cm2 and subsequently annealed in either an oxidizing or reducing environment. Following annealing at 1200 °C or higher, crystalline precipitates or solid solutions are observed, which are consistent with what is expected from the equilibrium phase diagram. © 1990, Materials Research Society. All rights reserved.

引用

页码：1502 / 1519

页数：18

共 39 条

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