EFFICIENT MICROTIP FABRICATION WITH CARBON COATING AND ELECTRON-BEAM DEPOSITION FOR ATOMIC FORCE MICROSCOPY

被引：25

作者：

YAMAKI, M ^{[1
]}

MIWA, T ^{[1
]}

YOSHIMURA, H ^{[1
]}

NAGAYAMA, K ^{[1
]}

机构：

[1] JRDC,ERATO,NAGAYAMA PROT ARRAY PROJECT,5 TOKODAI,TSUKUBA 30026,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.586038

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2447 / 2450

页数：4

共 7 条

[1] NEW SCANNING TUNNELING MICROSCOPY TIP FOR MEASURING SURFACE-TOPOGRAPHY [J].

AKAMA, Y ;

NISHIMURA, E ;

SAKAI, A ;

MURAKAMI, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01) :429-433

[2]

DUSHKIN CD, 1992, ULTRAMICROSCOPY, V42, P1519

[3] MICROPATTERN MEASUREMENT WITH AN ATOMIC FORCE MICROSCOPE [J].

FUJII, T ;

SUZUKI, M ;

MIYASHITA, M ;

YAMAGUCHI, M ;

ONUKI, T ;

NAKAMURA, H ;

MATSUBARA, T ;

YAMADA, H ;

NAKAYAMA, K .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :666-669

[4] RECONSTRUCTION OF STM AND AFM IMAGES DISTORTED BY FINITE-SIZE TIPS [J].

KELLER, D .

SURFACE SCIENCE, 1991, 253 (1-3) :353-364

[5] IMAGING STEEP, HIGH STRUCTURES BY SCANNING FORCE MICROSCOPY WITH ELECTRON-BEAM DEPOSITED TIPS [J].

KELLER, DJ ;

CHOU, CC .

SURFACE SCIENCE, 1992, 268 (1-3) :333-339

[6] SUBMICRON SI TRENCH PROFILING WITH AN ELECTRON-BEAM FABRICATED ATOMIC FORCE MICROSCOPE TIP [J].

LEE, KL ;

ABRAHAM, DW ;

SECORD, F ;

LANDSTEIN, L .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3562-3568

[7] SCANNING TUNNELING MICROSCOPY ON ROUGH SURFACES - DECONVOLUTION OF CONSTANT CURRENT IMAGES [J].

REISS, G ;

SCHNEIDER, F ;

VANCEA, J ;

HOFFMANN, H .

APPLIED PHYSICS LETTERS, 1990, 57 (09) :867-869

← 1 →