OPTIMIZING DEPOSITION PARAMETERS OF ELECTRON-BEAM EVAPORATED TIO2 FILMS

被引：28

作者：

LEHMANN, HW

FRICK, K

机构：

来源：

APPLIED OPTICS | 1988年 / 27卷 / 23期

关键词：

D O I：

10.1364/AO.27.004920

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4920 / 4924

页数：5

共 8 条

[1] SINGLE-CHIP COLOR CAMERA USING A FRAME-TRANSFER CCD [J].

ASCHWANDEN, F ;

GALE, MT ;

KIEFFER, P ;

KNOP, K .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (08) :1396-1401

[2] FABRICATION OF MOSAIC COLOR FILTERS BY DRY-ETCHING DIELECTRIC STACKS [J].

CURTIS, BJ ;

GALE, MT ;

LEHMANN, HW ;

BRUNNER, H ;

SCHUETZ, H ;

WIDMER, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (01) :70-74

[3]

FRICK K, IN PRESS ANNEALING T

[4]

GALE MT, 1988, P INT C OPTICAL SCI

[5] ION-ASSISTED DEPOSITION OF OPTICAL THIN-FILMS - LOW-ENERGY VS HIGH-ENERGY BOMBARDMENT [J].

MCNEIL, JR ;

BARRON, AC ;

WILSON, SR ;

HERRMANN, WC .

APPLIED OPTICS, 1984, 23 (04) :552-559

[6] REFRACTIVE-INDEXES OF TIO2 FILMS PRODUCED BY REACTIVE EVAPORATION OF VARIOUS TITANIUM-OXYGEN PHASES [J].

PULKER, HK ;

PAESOLD, G ;

RITTER, E .

APPLIED OPTICS, 1976, 15 (12) :2986-2991

[7]

PULKER HK, 1984, COATINGS GLASS, P377

[8] DEPOSITION OF OXIDE FILMS BY REACTIVE EVAPORATION [J].

RITTER, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1966, 3 (04) :225-&

← 1 →