THE RESPONSE OF MOS SENSORS WITH ULTRATHIN PALLADIUM GATES TO CARBON-MONOXIDE AND METHANE

被引：8

作者：

MACLAY, GJ

JELLEY, KW

NOWROOZIESFAHANI, S

FORMOSA, M

机构：

[1] Univ of Illinois, United States

来源：

SENSORS AND ACTUATORS | 1988年 / 14卷 / 04期

关键词：

D O I：

10.1016/0250-6874(88)80023-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：331 / 348

页数：18

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