OXIDE INTERFACIAL LAYERS IN AU OHMIC CONTACTS TO P-TYPE HG1-XCDXTE

被引:5
作者
KRISHNAMURTHY, V [1 ]
SIMMONS, A [1 ]
HELMS, CR [1 ]
机构
[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265
关键词
D O I
10.1063/1.102627
中图分类号
O59 [应用物理学];
学科分类号
摘要
Annealed Au contacts to p-type Hg1-xCdxTe with thin interfacial oxide layers exhibit ohmic behavior. These interfacial layers have been produced by plasma oxidizing the Hg1-xCdxTe surface prior to Au evaporation or as a result of electroless Au deposition from AuCl3 which also produces an interfacial layer. We believe this ohmic behavior is primarily a result of the low interface state density at the interfacial layer/Hg1-xCdxTe interface and in addition, a 100°C anneal promotes a further reduction in the interface state density and thus lowered the contact resistance. In comparison, as-deposited and annealed Au contacts without a thin interfacial layer were rectifying with a large barrier height.
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页码:925 / 927
页数:3
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