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SYNCHROTRON RADIATION-INDUCED ETCHING OF A CARBON-FILM IN AN OXYGEN GAS

被引：45
作者：
KYURAGI, H
URISU, T
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 18期
关键词：
D O I：
10.1063/1.97926
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1254 / 1256
页数：3
相关论文
共 9 条
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  • [9] ULTRAVIOLET PHOTO-DECOMPOSITION FOR METAL-DEPOSITION - GAS VERSUS SURFACE PHASE PROCESSES
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    [J]. APPLIED PHYSICS LETTERS, 1983, 42 (05) : 408 - 410
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