ULTRAVIOLET PHOTO-DECOMPOSITION FOR METAL-DEPOSITION - GAS VERSUS SURFACE PHASE PROCESSES

被引：61

作者：

WOOD, TH

WHITE, JC

THACKER, BA

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 05期

关键词：

D O I：

10.1063/1.93957

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：408 / 410

页数：3

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[7] LASER PHOTODEPOSITION OF REFRACTORY-METALS
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