THE ALPHA-BETA-SI3N4 QUESTION

被引：4

作者：

CAMPOSLORIZ, D

RILEY, FL

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1980年 / 15卷 / 09期

关键词：

D O I：

10.1007/BF00552332

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2385 / 2386

页数：2

共 9 条

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[3] EFFECT OF SILICA ON NITRIDATION OF SILICON [J].

CAMPOSLORIZ, D ;

RILEY, FL .

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[4]

CAMPOSLORIZ D, 1976, THESIS U LEEDS

[5]

CAMPOSLORIZ D, 1977, 9 P C SCI CER, P38

[6] INFLUENCE OF IRON AND HYDROGEN IN THE NITRIDATION OF SILICON [J].

DERVISBEGOVIC, H ;

RILEY, FL .

JOURNAL OF MATERIALS SCIENCE, 1979, 14 (05) :1265-1268

[7]

LUMBEY RJ, 1971, Patent No. 3591337

[8] ALPHA-BETA-SILICON NITRIDE PHASE-TRANSFORMATION [J].

MESSIER, DR ;

RILEY, FL ;

BROOK, RJ .

JOURNAL OF MATERIALS SCIENCE, 1978, 13 (06) :1199-1205

[9] ALPHA-BETA-SI3N4 QUESTION [J].

MORGAN, PED .

JOURNAL OF MATERIALS SCIENCE, 1980, 15 (03) :791-793

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