EFFECT OF SILICA ON NITRIDATION OF SILICON

被引：25

作者：

CAMPOSLORIZ, D ^{[1
]}

RILEY, FL ^{[1
]}

机构：

[1] UNIV LEEDS,HOULDSWORTH SCH APPL SCI,DEPT CERAMICS,LEEDS,ENGLAND

来源：

关键词：

D O I：

10.1007/BF00541093

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：195 / 198

页数：4

共 11 条

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[7] OXYGEN-CONTENT OF ALPHA-SI3N4 SINGLE-CRYSTALS
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[J]. JOURNAL OF MATERIALS SCIENCE, 1975, 10 (02) : 362 - 363
[8] KNIPPENBERG WF, 1969, MATER RES B, V4, P533
[9] LONGLAND P, COMMUNICATION
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