INFLUENCE OF IRON AND HYDROGEN IN THE NITRIDATION OF SILICON

被引：20

作者：

DERVISBEGOVIC, H

RILEY, FL

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1979年 / 14卷 / 05期

关键词：

D O I：

10.1007/BF00561317

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1265 / 1268

页数：4

共 12 条

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[2]

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[3]

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[4] MECHANISM FOR NITRIDATION OF FE-CONTAMINATED SILICON [J].

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MOULSON, AJ .

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[5]

CAMPOSLORIZ D, 1979, J MATER SCI, V14, P1007

[6] COMBINED EFFECTS OF FE AND H-2 ON KINETICS OF SILICON NITRIDATION [J].

DAWSON, WM ;

MOULSON, AJ .

JOURNAL OF MATERIALS SCIENCE, 1978, 13 (10) :2289-2290

[7] KINETICS OF THE OXIDATION AND NITRIDATION OF SILICON AT HIGH TEMPERATURES [J].

EVANS, JW ;

CHATTERJI, SK .

JOURNAL OF PHYSICAL CHEMISTRY, 1958, 62 (09) :1064-1067

[8]

EVANS UR, 1960, CORROSION OXIDATION, P834

[9]

MANGELS JA, 1975, J AM CERAM SOC, V58, P353

[10]

Parr N. L., 1961, POWDER METALL, V8, P152

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