ION-BOMBARDMENT DURING THIN-FILM DEPOSITION AND ITS INFLUENCE ON MECHANICAL AND CHEMICAL SURFACE-PROPERTIES

被引：58

作者：

WOLF, GK

ENSINGER, W

机构：

[1] Physikalisch-Chemisches Institut der Universität Heidelberg, 6900 Heidelberg

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷

关键词：

D O I：

10.1016/0168-583X(91)95201-N

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Directed energy in the form of energetic ion beams is an excellent tool for the modification of thin film and interface properties. The easy control of ion beam parameters causes the high flexibility of the technique. The influence of ion bombardment during deposition of thin films and coatings (IBAD) on their mechanical and chemical behaviour is reviewed in this article. Firstly the controlled production of IBAD films or multilayers with well defined composition is described. Secondly the influence of ion bombardment on selected properties is considered. Adhesion, stress and structure or texture and their dependence on process parameters are discussed. Thirdly the role of adhesion, stress and porosity of films for their use for corrosion and oxidation protection is treated. Finally in the conclusion an attempt is made to define the present status of IBAD techniques compared with other PVD processes.

引用

页码：173 / 181

页数：9

共 30 条

[1] A NEW MACHINE FOR FILM FORMATION BY ION AND VAPOR-DEPOSITION [J].

ANDOH, Y ;

SUZUKI, Y ;

MATSUDA, K ;

SATOU, M ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :111-115

[2]

BARTH M, 1991, HNUCL INSTR METH B, V59, P254

[3]

BARTH M, 1990, COMMUNICATION

[4]

BARTH M, 1990, SURFACE MODIFICATION, V3, P195

[5] PROPERTY MODIFICATION AND SYNTHESIS BY LOW-ENERGY PARTICLE BOMBARDMENT CONCURRENT WITH FILM GROWTH [J].

CUOMO, JJ ;

ROSSNAGEL, SM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :963-974

[6]

DUOMO JJ, 1989, HDB ION BEAM PROCESS

[7] ION-BEAM-ASSISTED COATINGS FOR CORROSION PROTECTION STUDIES [J].

ENSINGER, W ;

WOLF, GK .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 116 :1-14

[8]

Ensinger W., 1990, CFI - Ceramic Forum International - Berichte der Deutschen Keramischen Gesellschaft, V67, P374

[9]

HANS M, 1991, NUCL INSTRUM METH B, V23, P161

[10] MODIFICATION OF THIN-FILM PROPERTIES BY ION-BOMBARDMENT DURING DEPOSITION [J].

HARPER, JME ;

CUOMO, JJ ;

GAMBINO, RJ ;

KAUFMAN, HR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :886-892

← 1 2 3 →