MODIFICATION OF THIN-FILM PROPERTIES BY ION-BOMBARDMENT DURING DEPOSITION

被引：56

作者：

HARPER, JME ^{[1
]}

CUOMO, JJ ^{[1
]}

GAMBINO, RJ ^{[1
]}

KAUFMAN, HR ^{[1
]}

机构：

[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90489-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：886 / 892

页数：7

共 42 条

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[2] Allen T. H., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1305
[3] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .2. PB+ ION-BEAM DEPOSITION AND ANALYSIS OF DEPOSITS
AMANO, J
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (03): : 831 - 835
[4] DC BIAS-SPUTTERED ALUMINUM FILMS
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[5] THE USE OF ION-BEAM SPUTTERED OPTICAL COATINGS AS PROTECTIVE OVERCOATS
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 372 - 375
[6] Cuomo J. J., 1982, IBM Technical Disclosure Bulletin, V25, P1681
[7] MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION
CUOMO, JJ
HARPER, JME
GUARNIERI, CR
YEE, DS
ATTANASIO, LJ
ANGILELLO, J
WU, CT
HAMMOND, RH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 349 - 354
[8] CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109
[9] INFLUENCE OF SPUTTERING PARAMETERS ON COMPOSITION OF MULTICOMPONENT FILMS
CUOMO, JJ
GAMBINO, RJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 79 - 83
[10] CUOMO JJ, 1982, 25TH P ANN TECH C SO, P48

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