PEROXIDE ETCH CHEMISTRY ON -LESS-THAN-100-GREATER-THAN-IN0.53GA0.47AS

被引：29

作者：

ASPNES, DE

STOCKER, HJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 02期

关键词：

D O I：

10.1116/1.571667

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：413 / 416

页数：4

共 16 条

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