LASER-INDUCED DESORPTION AND ETCHING PROCESSES ON CHLORINATED CU AND SOLID CUCL SURFACES

被引：56

作者：

SESSELMANN, W

MARINERO, EE

CHUANG, TJ

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 41卷 / 03期

关键词：

D O I：

10.1007/BF00616842

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：209 / 221

页数：13

共 42 条

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