LASER-INDUCED DESORPTION AND ETCHING PROCESSES ON CHLORINATED CU AND SOLID CUCL SURFACES

[21] THERMODYNAMICS OF VAPORIZATION OF COPPER(I) HALIDES [J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1977, 435 (NOV): : 33 - 44

[22] LONG JP, 1983, MRS S P, V13, P89

[23] UV LASER-GENERATED FLUORINE ATOM ETCHING OF POLYCRYSTALLINE SI, MO, AND TI [J]. APPLIED PHYSICS LETTERS, 1985, 46 (07) : 654 - 656

[24] LOPER GL, 1984, P SOC PHOTO-OPT INST, V459, P121, DOI 10.1117/12.939446

[25] RECENT DEVELOPMENTS IN ELECTRON AND PHOTON STIMULATED DESORPTION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 538 - 543

[26] DESORPTION FROM METAL SURFACES BY LOW-ENERGY ELECTRONS [J]. JOURNAL OF CHEMICAL PHYSICS, 1964, 41 (11) : 3311 - &

[27] LASER-INDUCED SPUTTERING OF OXIDES AND COMPOUND SEMICONDUCTORS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) : 301 - 306

[28] READY JF, 1971, EFFECT HIGH POWER LA, P72

[29] INTERACTION OF SLOW ELECTRONS WITH CHEMISORBED OXYGEN [J]. CANADIAN JOURNAL OF PHYSICS, 1964, 42 (05) : 886 - &

[30] MASS SPECTRA OF CUCL, CUBR, AND CUI [J]. JOURNAL OF CHEMICAL PHYSICS, 1955, 23 (12) : 2442 - 2442

[21] THERMODYNAMICS OF VAPORIZATION OF COPPER(I) HALIDES [J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1977, 435 (NOV): : 33 - 44

[22] LONG JP, 1983, MRS S P, V13, P89

[23] UV LASER-GENERATED FLUORINE ATOM ETCHING OF POLYCRYSTALLINE SI, MO, AND TI [J]. APPLIED PHYSICS LETTERS, 1985, 46 (07) : 654 - 656

[24] LOPER GL, 1984, P SOC PHOTO-OPT INST, V459, P121, DOI 10.1117/12.939446

[25] RECENT DEVELOPMENTS IN ELECTRON AND PHOTON STIMULATED DESORPTION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 538 - 543

[26] DESORPTION FROM METAL SURFACES BY LOW-ENERGY ELECTRONS [J]. JOURNAL OF CHEMICAL PHYSICS, 1964, 41 (11) : 3311 - &

[27] LASER-INDUCED SPUTTERING OF OXIDES AND COMPOUND SEMICONDUCTORS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) : 301 - 306

[28] READY JF, 1971, EFFECT HIGH POWER LA, P72

[29] INTERACTION OF SLOW ELECTRONS WITH CHEMISORBED OXYGEN [J]. CANADIAN JOURNAL OF PHYSICS, 1964, 42 (05) : 886 - &

[30] MASS SPECTRA OF CUCL, CUBR, AND CUI [J]. JOURNAL OF CHEMICAL PHYSICS, 1955, 23 (12) : 2442 - 2442