SPUTTERING OF TUNGSTEN BY CARBON

被引：63

作者：

ECKSTEIN, W

ROTH, J

机构：

[1] Max-Planck-Institut für Plasmaphysik, EURATOM Association, München

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 53卷 / 03期

关键词：

D O I：

10.1016/0168-583X(91)95614-J

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The sputtering of tungsten by carbon is investigated experimentally and by computer simulation. The erosion and deposition is studied as a function of the fluence of the incident carbon at 1 and 6 keV and for different angles of incidence. Both, experimental data and computer simulation show a transition from net carbon deposition to net erosion as the angle of incidence exeeds values of 40-degrees.

引用

页码：279 / 284

页数：6

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