HARD X-RAY MICROPROBE WITH TOTAL-REFLECTION MIRRORS

被引：47

作者：

SUZUKI, Y ^{[1
]}

UCHIDA, F ^{[1
]}

机构：

[1] HITACHI LTD, CENT RES LAB, KOKUBUNJI, TOKYO 185, JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1142710

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A hard x-ray microprobe with a grazing-incidence total-reflection mirror system is developed. The optical system has a pair of elliptical mirrors arranged in a crossed mirror geometry (Kirkpatrick-Baez configuration) and forms demagnified images of an x-ray source. A focused spot size of 3.5-mu-m x 4.8-mu-m is obtained at a wavelength of 2.3 angstrom. A focusing test with an x-ray source determined by a pinhole generates a finer microbeam. Preliminary experiments on scanning x-ray microscopy are performed using the focused x-ray beam.

引用

页码：578 / 581

页数：4

共 14 条

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