TIME-RESOLVED TEM OF PULSED CRYSTALLIZATION OF AMORPHOUS SI AND GE FILMS

被引：29

作者：

BOSTANJOGLO, O

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 70卷 / 02期

关键词：

D O I：

10.1002/pssa.2210700214

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：473 / 481

页数：9

共 27 条

[1] DYNAMICS OF Q-SWITCHED LASER ANNEALING [J].

AUSTON, DH ;

GOLOVCHENKO, JA ;

SIMONS, AL ;

SURKO, CM ;

VENKATESAN, TNC .

APPLIED PHYSICS LETTERS, 1979, 34 (11) :777-779

[2] TIME-RESOLVED REFLECTIVITY OF ION-IMPLANTED SILICON DURING LASER ANNEALING [J].

AUSTON, DH ;

SURKO, CM ;

VENKATESAN, TNC ;

SLUSHER, RE ;

GOLOVCHENKO, JA .

APPLIED PHYSICS LETTERS, 1978, 33 (05) :437-440

[3] MELTING MODEL FOR PULSING-LASER ANNEALING OF IMPLANTED SEMICONDUCTORS [J].

BAERI, P ;

CAMPISANO, SU ;

FOTI, G ;

RIMINI, E .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) :788-797

[4] THEORETICAL AND EXPERIMENTAL INVESTIGATION OF THE DYNAMICS OF PULSED LASER ANNEALING OF AMORPHOUS-SILICON [J].

BHATTACHARYYA, A ;

STREETMAN, BG ;

HESS, K .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) :3611-3617

[5]

BOSTANJOGLO O, UNPUB OPTIK

[6] CRYSTALLIZATION-FRONT VELOCITY DURING SCANNED LASER CRYSTALLIZATION OF AMORPHOUS-GE FILMS [J].

CHAPMAN, RL ;

FAN, JCC ;

ZEIGER, HJ ;

GALE, RP .

APPLIED PHYSICS LETTERS, 1980, 37 (03) :292-295

[7] KINETICS OF STRUCTURAL RELAXATION IN AMORPHOUS ALLOY OBSERVED BY X-RAY-DIFFRACTION [J].

EGAMI, T ;

ICHIKAWA, T .

MATERIALS SCIENCE AND ENGINEERING, 1978, 32 (03) :293-295

[8] SOLID-PHASE GROWTH OF LARGE ALIGNED GRAINS DURING SCANNED LASER CRYSTALLIZATION OF AMORPHOUS-GE FILMS ON FUSED-SILICA [J].

FAN, JCC ;

ZEIGER, HJ ;

GALE, RP ;

CHAPMAN, RL .

APPLIED PHYSICS LETTERS, 1980, 36 (02) :158-161

[9]

Feinleib J., 1972, J NONCRYSTALLINE SOL, V8, P909, DOI [10.1016/0022-3093(72)90246-3, DOI 10.1016/0022-3093(72)90246-3]

[10] SOME FEATURES OF LASER ANNEALING OF IMPLANTED SILICON LAYERS [J].

KHAIBULLIN, IB ;

SHTYRKOV, EI ;

ZARIPOV, MM ;

BAYAZITOV, RM ;

GALJAUTDINOV, MF .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (3-4) :225-233

← 1 2 3 →