EPITAXIAL YTTRIUM SILICIDE ON (111) SILICON BY VACUUM ANNEALING

被引：38

作者：

GURVITCH, M

LEVI, AFJ

TUNG, RT

NAKAHARA, S

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.98453

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：311 / 313

页数：3

共 15 条

[1] THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS [J].

BAGLIN, JE ;

HEURLE, FMD ;

PETERSSON, CS .

APPLIED PHYSICS LETTERS, 1980, 36 (07) :594-596

[2] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES [J].

BAGLIN, JEE ;

DHEURLE, FM ;

PETERSSON, CS .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2841-2846

[3]

CHANG YS, 1986, MATERIALS RES SOC S, V54, P57

[4]

CHEN LJ, 1986, MATER RES SOC S P, V54, P245

[5]

HENSEL JC, 1986, MATER RES SOC S P, V54, P499

[6]

HUGGINS HA, 1983, J VAC SCI TECHNOL A, V1, P77, DOI 10.1116/1.572314

[7]

Ishizaka A., 1982, Molecular Beam Epitaxy and Clean Surface Techniques. Collected Papers of 2nd International Symposium, P183

[8] EPITAXIAL-GROWTH OF RARE-EARTH SILICIDES ON (111) SI [J].

KNAPP, JA ;

PICRAUX, ST .

APPLIED PHYSICS LETTERS, 1986, 48 (07) :466-468

[9] KINETICS AND MORPHOLOGY OF ERBIUM SILICIDE FORMATION [J].

KNAPP, JA ;

PICRAUX, ST ;

WU, CS ;

LAU, SS .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (10) :3747-3757

[10]

KNAPP JA, 1986, MATER RES SOC S P, V54, P261

← 1 2 →