KINETICS AND MORPHOLOGY OF ERBIUM SILICIDE FORMATION

被引：50

作者：

KNAPP, JA ^{[1
]}

PICRAUX, ST ^{[1
]}

WU, CS ^{[1
]}

LAU, SS ^{[1
]}

机构：

[1] UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92093

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 10期

关键词：

D O I：

10.1063/1.335640

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3747 / 3757

页数：11

共 18 条

[1] NUCLEATION-CONTROLLED THIN-FILM INTERACTIONS - SOME SILICIDES [J].

ANDERSON, R ;

BAGLIN, J ;

DEMPSEY, J ;

HAMMER, W ;

DHEURLE, F ;

PETERSSON, S .

APPLIED PHYSICS LETTERS, 1979, 35 (03) :285-287

[2] THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS [J].

BAGLIN, JE ;

HEURLE, FMD ;

PETERSSON, CS .

APPLIED PHYSICS LETTERS, 1980, 36 (07) :594-596

[3] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES [J].

BAGLIN, JEE ;

DHEURLE, FM ;

PETERSSON, CS .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2841-2846

[4] FORMATION OF THIN-FILMS OF NISI - METASTABLE STRUCTURE, DIFFUSION MECHANISMS IN INTERMETALLIC COMPOUNDS [J].

DHEURLE, F ;

PETERSSON, CS ;

BAGLIN, JEE ;

LAPLACA, SJ ;

WONG, CY .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (12) :4208-4218

[5] VALENCE FLUCTUATIONS OF YTTERBIUM IN SILICON-RICH COMPOUNDS [J].

IANDELLI, A ;

PALENZONA, A ;

OLCESE, GL .

JOURNAL OF THE LESS-COMMON METALS, 1979, 64 (02) :213-220

[6]

KERN W, 1970, RCA REV, V31, P187

[7]

Knapp J., UNPUB

[8] ERBIUM SILICIDE FORMATION USING A LINE-SOURCE ELECTRON-BEAM [J].

KNAPP, JA ;

PICRAUX, ST ;

WU, CS ;

LAU, SS .

APPLIED PHYSICS LETTERS, 1984, 44 (08) :747-749

[9] KINETICS AND MORPHOLOGY OF ERBIUM SILICIDE FORMATION [J].

KNAPP, JA ;

PICRAUX, ST ;

WU, CS ;

LAU, SS .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (10) :3747-3757

[10] A LINE-SOURCE ELECTRON-BEAM ANNEALING SYSTEM [J].

KNAPP, JA ;

PICRAUX, ST .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) :1492-1498

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