ERBIUM SILICIDE FORMATION USING A LINE-SOURCE ELECTRON-BEAM

被引：19

作者：

KNAPP, JA ^{[1
]}

PICRAUX, ST ^{[1
]}

WU, CS ^{[1
]}

LAU, SS ^{[1
]}

机构：

[1] UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92093

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 08期

关键词：

D O I：

10.1063/1.94903

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：747 / 749

页数：3

共 11 条

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APPLIED PHYSICS LETTERS, 1979, 35 (03) :285-287

[2] THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS [J].

BAGLIN, JE ;

HEURLE, FMD ;

PETERSSON, CS .

APPLIED PHYSICS LETTERS, 1980, 36 (07) :594-596

[3] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES [J].

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PETERSSON, CS .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2841-2846

[4]

Knapp J. A., 1983, Laser-Solid Interactions and Transient Thermal Processing of Materials, P557

[5] A LINE-SOURCE ELECTRON-BEAM ANNEALING SYSTEM [J].

KNAPP, JA ;

PICRAUX, ST .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) :1492-1498

[6] SURFACE-MORPHOLOGY OF ERBIUM SILICIDE [J].

LAU, SS ;

PAI, CS ;

WU, CS ;

KUECH, TF ;

LIU, BX .

APPLIED PHYSICS LETTERS, 1982, 41 (01) :77-80

[7] THE SCHOTTKY-BARRIER HEIGHT OF THE CONTACTS BETWEEN SOME RARE-EARTH-METALS (AND SILICIDES) AND P-TYPE SILICON [J].

NORDE, H ;

DESOUSAPIRES, J ;

DHEURLE, F ;

PESAVENTO, F ;

PETERSSON, S ;

TOVE, PA .

APPLIED PHYSICS LETTERS, 1981, 38 (11) :865-867

[8] CONTACT REACTION BETWEEN SI AND RARE-EARTH-METALS [J].

THOMPSON, RD ;

TSAUR, BY ;

TU, KN .

APPLIED PHYSICS LETTERS, 1981, 38 (07) :535-537

[9] ION-BEAM-INDUCED MODIFICATION OF SILICIDE FORMATION IN RARE-EARTH-METALS - ER-SI AND TB-SI SYSTEMS [J].

TSAUR, BY ;

HUNG, LS .

APPLIED PHYSICS LETTERS, 1980, 37 (10) :922-924

[10] LOW SCHOTTKY-BARRIER OF RARE-EARTH SILICIDE ON N-SI [J].

TU, KN ;

THOMPSON, RD ;

TSAUR, BY .

APPLIED PHYSICS LETTERS, 1981, 38 (08) :626-628

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