LOW SCHOTTKY-BARRIER OF RARE-EARTH SILICIDE ON N-SI

被引:322
作者
TU, KN
THOMPSON, RD
TSAUR, BY
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D O I
10.1063/1.92457
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O59 [应用物理学];
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页码:626 / 628
页数:3
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共 10 条
  • [1] ROLE OF METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED-CIRCUIT TECHNOLOGY
    ANDREWS, JM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (06): : 972 - 984
  • [2] THE FORMATION OF SILICIDES FROM THIN-FILMS OF SOME RARE-EARTH-METALS
    BAGLIN, JE
    HEURLE, FMD
    PETERSSON, CS
    [J]. APPLIED PHYSICS LETTERS, 1980, 36 (07) : 594 - 596
  • [3] MOFFATT WG, 1978, BINARY PHASE DIAGRAM
  • [4] SCHOTTKY-BARRIER HEIGHT OF IRIDIUM SILICIDE
    OHDOMARI, I
    TU, KN
    DHEURLE, FM
    KUAN, TS
    PETERSSON, S
    [J]. APPLIED PHYSICS LETTERS, 1978, 33 (12) : 1028 - 1030
  • [5] OHDOMARI J, 1979, J APPL PHYS, V51, P7020
  • [6] INTERFACIAL REACTION AND SCHOTTKY-BARRIER IN METAL-SILICON SYSTEMS
    OTTAVIANI, G
    TU, KN
    MAYER, JW
    [J]. PHYSICAL REVIEW LETTERS, 1980, 44 (04) : 284 - 287
  • [7] SALTICK J, 1969, OHMIC CONTACT SEMICO, P167
  • [8] SOLOMAN P, COMMUNICATION
  • [9] THOMPSON RD, 1979, RC7989 IBM RES
  • [10] [No title captured]