PARTICLE DENSITIES IN RADIO-FREQUENCY DISCHARGES OF SILANE

被引：51

作者：

SPEARS, KG

KAMPF, RP

ROBINSON, TJ

机构：

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1988年 / 92卷 / 18期

关键词：

D O I：

10.1021/j100329a046

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：5297 / 5302

页数：6

共 8 条

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[6] PARTICLE DISTRIBUTIONS AND LASER PARTICLE INTERACTIONS IN AN RF DISCHARGE OF SILANE [J].

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[7] PARTICLE NUMBER DENSITIES BY LIGHT-SCATTERING FLUCTUATION ANALYSIS [J].

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[8]

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