SPUTTER-DEPOSITED ZIRCONIA-ALUMINA NANOLAMINATE COATINGS

被引:10
作者
AITA, CR [1 ]
SCANLAN, CM [1 ]
GAJDARDZISKAJOSIFOVSKA, M [1 ]
机构
[1] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201
来源
JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY | 1994年 / 46卷 / 10期
关键词
D O I
10.1007/BF03222607
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The mechanical properties of zirconia are known to be a function of phase composition. This article shows that a nanolaminate geometry can be used to control the phase composition of zirconia thin-film coatings. The nanolaminates consist of nanoscale multilayers of polycrystalline zirconia and amorphous alumina grown by reactive sputter deposition. X-ray diffraction and high-resolution electron microscopy results show that both monoclinic (m) and tetragonal (t) zirconia polymorphs are formed in the zirconia layers. The zirconia layers have a strong crystallographic texture. Most zirconia crystallites grow with closest-packed planes (either t{111} or m{11 ($) over bar 1}) oriented parallel to the substrate. The volume fraction of tetragonal zirconia, the desired phase for transformation-roughening behavior, increases with decreasing zirconia layer thickness. Nanolaminates with a volume fraction of tetragonal zirconia exceeding 0.8 were produced without the addition of a stabilizing dopant, and independent of the kinetic factors that limit tetragonal zirconia growth in pure zirconia coatings.
引用
收藏
页码:40 / 42
页数:3
相关论文
共 17 条
[1]  
Aita C. R., 1994, Nanostructured Materials, V4, P257, DOI 10.1016/0965-9773(94)90135-X
[2]   FUNDAMENTAL OPTICAL-ABSORPTION EDGE OF SPUTTER-DEPOSITED ZIRCONIA AND YTTRIA [J].
AITA, CR ;
KWOK, CK .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (11) :3209-3214
[3]  
AITA CR, 1992, MATER SCI TECH SER, V8, P666, DOI 10.1179/026708392790171152
[4]   GLOW-DISCHARGE MASS-SPECTROMETRY FOR SPUTTERING DISCHARGE DIAGNOSTICS [J].
AITA, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1985, 3 (03) :625-630
[5]   PHASE-FORMATION IN SPUTTER-DEPOSITED METAL (V, NB, ZR, Y) OXIDES - RELATIONSHIP TO METAL, METAL-OXYGEN, AND OXYGEN FLUX [J].
AITA, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :1540-1547
[6]  
AITA CR, 1992, WIDE BAND GAP SEMICO, P737
[7]  
BAUER E, 1964, SINGLE CRYSTAL FILMS, P43
[8]  
DERUIJTER WJ, 1993, SCANNING MICROSCOPY, V6, P347
[9]   PHASE ANALYSIS IN ZIRCONIA SYSTEMS [J].
GARVIE, RC .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1972, 55 (06) :303-&
[10]  
Green D. J., 1989, TRANSFORMATION TOUGH