THE STRUCTURE ZONE MODEL APPLIED TO IONIZED CLUSTER BEAM FILMS - AL ON SIO2

被引：3

作者：

YAHASHI, A ^{[1
]}

LEVENSON, LL ^{[1
]}

USUI, H ^{[1
]}

YAMADA, I ^{[1
]}

机构：

[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,KYOTO 606,JAPAN

来源：

关键词：

18;

D O I：

10.1016/0169-4332(89)90187-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：37 / 42

页数：6

共 17 条

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ATWATER, HA
THOMPSON, CV
SMITH, HI
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (05) : 2337 - 2353
[2] ATWATER HA, 1986, BEAM SOLID INTERACTI, V51, P337
[3] POSSIBILITY OF SUBGRAIN ROTATION DURING RECRYSTALLIZATION
LI, JCM
[J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (10) : 2958 - &
[4] LIU JC, 1988, IN PRESS FAL MAT RES
[5] REVISED STRUCTURE ZONE MODEL FOR THIN-FILM PHYSICAL STRUCTURE
MESSIER, R
GIRI, AP
ROY, RA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 500 - 503
[6] MOVCHAN BA, 1969, PHYS METALS METALLOG, V28, P83
[7] ANALYTICAL AND NUMERICAL MODELING OF COLUMNAR EVOLUTION IN THIN-FILMS
SROLOVITZ, DJ
MAZOR, A
BUKIET, BG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2371 - 2380
[8] IONIZED CLUSTER BEAM TECHNIQUE FOR THIN-FILM DEPOSITION
TAKAGI, T
[J]. ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS, 1986, 3 (2-3): : 271 - 278
[9] TAKAGI T, 1988, IONIZED CLUSTER BEAM
[10] TAKALA T, 1987, ACTA POLYTECH SC MA, P1